@article{799551,
  author = {K Kreider and D DeWitt and J Fowler and James Proctor and W Kimes and D Ripple and Benjamin Tsai},
  title = {Comparing the Transient Response of a Resistive-Type Sensor with a Thin-Film Thermocouple During the Post-Exposure Bake Process, Data Analysis and Modeling for Process Control},
  year = {2004},
  number = {5378},
  month = {2004-01-01 00:01:00},
  publisher = {SPIE},
  language = {en},
}