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Displaying 151 - 175 of 221

Dynamic SIMS Utilizing SF 5 + Polyatomic Primary Ion Beams for Drug Delivery Applications

June 1, 2004

Author(s)

Christine M. Mahoney, S V. Roberson, John G. Gillen

The behavior of various biodegradable polymer films (e.g. polylactic acid, polyglycolic acid and polycaprolactone) as well as some model drugs (theophylline and 4-acetamidophenol) under dynamic SF 5 + primary ion bombardment is explored. A series of

Positive Secondary Ion Yield Enhancement of Metal Elements Using Trichlorotrifluoroethane and Tetrachloroethene Backfilling

June 1, 2004

Author(s)

P Chi, John G. Gillen

Positive secondary ion yields are strongly enhanced by the presence of reactive gas species. Oxygen primary ion bombardment or oxygen backfilling is commonly used for this purpose. However, for some weak oxide forming metal elements such as Nb, Mo, and Ag

Bevel Depth Profiling SIMS for Analysis of Layer Structures

September 1, 2003

Author(s)

John G. Gillen, Scott A. Wight, P Chi, Albert J. Fahey, Jennifer R. Verkouteren, Eric S. Windsor, D. B. Fenner

We are evaluating the use of bevel depth profiling Secondary Ion Mass Spectrometry (SIMS) for the characterization of layered semiconductor materials. In this procedure, a sub-degree angle bevel is cut into the analytical sample with an oxygen or cesium

Thermolithographic Patterning of Sol-Gel Metal Oxides on Micro hot plate Sensing Arrays Using Organosilanes

September 1, 2003

Author(s)

N O. Savage, S V. Roberson, John G. Gillen, Michael J. Tarlov, Stephen Semancik

Sol-gel derived SnO2 and Fe2O3 were selectively deposited on elements of microhotplate (?HP) arrays. The silicon micromachined ?HP arrays contain heating elements (100 ?m x 100 ?m) that are electronically addressable and thermally isolated from each other

Raman Microspectroscopy of some High Explosives heated to High Temperatures

August 1, 2003

Author(s)

E S. Etz, S V. Roberson, John G. Gillen

Paper reports on the micro-Raman spectra of several high explosives heated to high temperatures, up to melting point. These spectroscopic results are correlated with the degradation and decomposition of these energetic materials.

Tools and Procedures for Quantitative Microbeam Isotope Ratio Imaging by Secondary Ion Mass Spectrometry

July 1, 2003

Author(s)

John G. Gillen, David S. Bright

In this work we demonstrate the use of secondary ion mass spectrometry (SIMS) combined with the Lispix image processing program (Bright 1995) to generate quantitative isotope ratio images from a test sample of a calcium-aluminum rich inclusion (CAI) from

Secondary Ion Mass Spectrometry Using Cluster Primary Ion Beams

January 1, 2003

Author(s)

John G. Gillen, Albert J. Fahey

At the National Institute of Standards and Technology (NIST) we have a capability for conducting cluster SIMS experiments on both our ion microscope and TOF-SIMS instruments. This paper will review our recent work on cluster ion source development

Copper Oxide Precipitates in NBS Standard Reference Material 482

December 1, 2002

Author(s)

Eric S. Windsor, R Carlton, John G. Gillen, Scott A. Wight, David S. Bright

Copper oxide has been detected in the copper containing alloys of Standard Reference Material (SRM) 482. This occurrence is significant because it represents heterogeneity within a standard reference material that was certified to be homogeneous on a

Sol-Gel Materials for Gas Phase Sensing Using Microhotplate Arrays

February 1, 2002

Author(s)

N O. Savage, Richard E. Cavicchi, Michael J. Tarlov, Stephen Semancik, J Greg Gillen

Sol-gel chemistry is used to create suspensions (sols) of small particles of materials such as metal oxides. These suspensions can be dried to a gel or powder or used in the sol form for coatings and thin films. One promising application of sol-gel derived

Surface Analysis Studies of Yield Enhancements in Secondary Ion Mass Spectrometry by Polyatomic Projectiles

May 1, 2001

Author(s)

E Fuoco, J Greg Gillen, M Wijesundara, William E. Wallace, L Hanley

In this paper examine the mechanism of secondary ion yield enhancements previously observed for polyatomic projectiles by measuring the weight loss, volume loss, and surface composition of poly(methylmethacrylate) (PMMA) films sputtered by keV SF 5 + and

Negative Cesium Sputter Ion Source for Generating Cluster Primary Ion Beams for Secondary Ion Mass Spectrometry Analysis

April 1, 2001

Author(s)

John G. Gillen, R L. King, B Freibaum, R Lareau, J Bennett, F Chmara

The use of a cluster (or polyatomic) primary ion projectile for organic SIMS has been demonstrated to increase the yield of characteristic molecular secondary ions, more efficiently desorb higher molecular weight species and reduce the accumulation of

Cluster Primary Ion Beam Secondary Ion Mass Spectrometry for Semiconductor Characterization

January 1, 2001

Author(s)

John G. Gillen, S V. Roberson, Albert J. Fahey, Marlon L. Walker, J Bennett, R Lareau

We are evaluating the use of polyatomic and cluster primary ion beams for characterization of semiconductor materials by secondary ion mass spectrometry using both magnetic sector and time-of-flight SIMS instruments. Primary ion beams of SF 5+, C 8- and

High Temperature Materials for Thin-Film Thermocouples on Silicon Wafers

November 1, 2000

Author(s)

Kenneth G. Kreider, John G. Gillen

We Have developed an instrumented calibration wafer for radiometric temperature measurements in rapid thermal processing (RPT) tools for semiconductor processing. The instrumented wafers have sputter deposited thin-film thermocouples to minimize the