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Displaying 176 - 200 of 221

Thin-Film Calibration Wafer Materials for RTP Temperature Measurement

July 1, 1999
Author(s)
Kenneth G. Kreider, John G. Gillen
We are developing an instrumented calibration wafer for radiometric temperature measurements that uses thin-film thermocouples to minimize the thermal disturbance of the wafer by the sensors. The thin-film thermocouples are sputter deposited on a thermally

Elemental and Molecular Imaging of Human Hair Using Secondary Ion Mass Spectrometry

April 1, 1999
Author(s)
John G. Gillen, S V. Roberson, C M. Ng, M Stranick
Secondary ion mass spectrometry (SIMS) is used to image the spatial distribution of elemental and molecular species on the surface and in cross-sections of doped human hair using a magnetic sector SIMS instrument operated as an ion microprobe. Analysis of

Quantitative secondary ion mass spectrometry imaging of self-assembled monolayer films for electron beam dose mapping in the environmental scanning electron microscope

July 1, 1998
Author(s)
John G. Gillen, Scott A. Wight, David S. Bright, T M. Herne
Fluorinated alkanethiol self assembled monolayers (SAM) films immobilized on gold substrates have been used as electron-sensitive resists to map quantitatively the spatial distribution of the primary electron beam scattering in an environmental scanning

Automated SIMS for Determining Isotopic Distributions in Particle Polutations

February 1, 1998
Author(s)
David S. Simons, John G. Gillen, Cynthia J. Zeissler, R H. Fleming, P J. McNitt
A System has been developed to make rapid automated measurements of isotopic ratios from many individual micrometer-sized particles dispersed on a substrate. High particle throughput is achieved by using a commercial secondary ion microscope to collect