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The Scanning Scattering Microscopy for Surface and Buried Interface Roughness and Defect Imaging

Published

Author(s)

J Lorincik, J Fine, J Greg Gillen
Proceedings Title
Society of Photo-Optical Instrumentation Engineers
Conference Dates
February 11, 2009
Conference Location
backfill, SC
Conference Title
Proceedings of the Society of Photo-Optical Instrumentation Engineers

Citation

Lorincik, J. , Fine, J. and Gillen, J. (1997), The Scanning Scattering Microscopy for Surface and Buried Interface Roughness and Defect Imaging, Society of Photo-Optical Instrumentation Engineers, backfill, SC (Accessed March 3, 2024)
Created November 30, 1997, Updated October 12, 2021