@conference{793876,
  author = {J Lorincik and J Fine and J Gillen},
  title = {The Scanning Scattering Microscopy for Surface and Buried Interface Roughness and Defect Imaging},
  year = {1997},
  month = {1997-12-01 00:12:00},
  publisher = {Society of Photo-Optical Instrumentation Engineers, backfill, SC},
  language = {en},
}