TY  - CONF
AU  - J Lorincik
AU  - J Fine
AU  - J Gillen
C2  - Society of Photo-Optical Instrumentation Engineers, backfill, SC
DA  - 1997-12-01 00:12:00
LA  - en
PB  - Society of Photo-Optical Instrumentation Engineers, backfill, SC
PY  - 1997
TI  - The Scanning Scattering Microscopy for Surface and Buried Interface Roughness and Defect Imaging
ER  -