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Displaying 926 - 950 of 3672

Organosilicate Polymer E-Beam Resists with High Resolution, Sensitivity and Stability

February 28, 2013
Author(s)
Christopher Soles, Richard Kasica, Hae-Jeong Lee, Jae H. Sim, Sung-Il Lee, Ki-Bum Kim, Hyun-Mi Kim, Do Y. Yoon
Hydrogen silsesquioxane (HSQ) is an attractive electron-beam (e-beam) resist for sub-20 nm lithography due to its high resolution, excellent line-edge-roughness (LER), and good plasma etch resistance. However, the sensitivity and long-term stability of HSQ

To Predict Vibrational Spectra, Are Anharmonic Calculations Worthwhile?

January 22, 2013
Author(s)
Ruth L. Jacobsen, Karl K. Irikura, Russell D. Johnson III, Raghu N. Kacker
Anharmonic calculations using vibrational perturbation theory are known to provide near-spectroscopic accuracy when combined with high-level ab initio potential energy functions. However, performance with economical, popular electronic structure methods is

A Humidity Generator for Temperatures to 200 degC and Pressures to 1.6 MPa

November 30, 2012
Author(s)
D Vega-Maza, W. Wyatt Miller, Dean C. Ripple, Gregory E. Scace
We have constructed a new humidity generator that produces gas streams of known moisture content at temperatures from 85 °C to 200 °C, absolute pressures from 0.2 MPa to 1.6 MPa, and relative humidities from 10 % to 90 %. The generator produces a moist gas

Absolute line intensities for ethylene from 1800 to 2350 cm-1.

November 17, 2012
Author(s)
Walter J. Lafferty, Jean-Marie Flaud, A. Ben Hassen, F. K. Kwabia Tchana, X Landsheere, H Aroui
Fourteen Fourier transform spectra of ethylene (C2H4) have been recorded in the 1800-2350 spectral domain with different path-lengths and pressures and used to derive individual line intensities for lines belonging to the ν7 + ν8, ν4 + ν8 , ν6 + ν10, ν6 +
Displaying 926 - 950 of 3672
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