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Displaying 58201 - 58225 of 74191

Methods Divergence Between Measurements of Micrometer and Sub-Micrometer Surface Features

January 1, 1994
Author(s)
T Mcwaid, Theodore V. Vorburger, Joseph Fu, Jun-Feng Song, Eric P. Whitenton
Measurements of micrometer and sub-micrometer surface features have been made using a stylus profiler, an STM, an AFM, and a phase-measuring interferometric microscope. The differences between measurements of the same surface feature as obtained with the

Microform Calibrations in Surface Metrology

January 1, 1994
Author(s)
Jun-Feng Song, F Rudder, Theodore V. Vorburger, A Hartman, Brian R. Scace, J Smith
Microform calibrations include the measurement of complex profile forms and position errors of micrometer scale in combination with the measurement of deviations from a specified profile and surface texture of profile segments. Tolerances on the profile
Displaying 58201 - 58225 of 74191
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