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The Measurement and Uncertainty of a Calibration Standard for the SEM

Published

Author(s)

Joseph Fu, M Croarkin, Theodore V. Vorburger

Abstract

Standard Reference Material 484 is an artifact for calibration the magnification scale of a Scanning Electron Microscope (SEM) within the range of 1000X to 20000X. Seven issues, SRM-484, and SRM-484a to SRM-484f, have been certified between 1977 and 1992. This publication documents the instrumentation, measurement procedures and determination of uncertainty for SRM-484 and illustrates with data from issues 484c and 484f.
Citation
Journal of Research of the National Institute of Standards and Technology
Volume
99
Issue
2

Keywords

interferometer, precision, random error, SRM, systematic error, uncertainty

Citation

Fu, J. , Croarkin, M. and Vorburger, T. (1994), The Measurement and Uncertainty of a Calibration Standard for the SEM, Journal of Research of the National Institute of Standards and Technology, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=820682 (Accessed February 25, 2024)
Created March 1, 1994, Updated February 19, 2017