@article{95731, author = {Joseph Fu and M Croarkin and Theodore Vorburger}, title = {The Measurement and Uncertainty of a Calibration Standard for the SEM}, year = {1994}, number = {99}, month = {1994-03-01}, publisher = {Journal of Research of the National Institute of Standards and Technology}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=820682}, language = {en}, }