Olthoff, J.
, Van Brunt, R.
, Radovanov, S.
and Rees, J.
(1994),
Use of an Ion Energy Analyzer-Mass Spectrometer to Measure Ion Kinetic-Energy Distributions from RF Discharges in Argon-Helium Gas Mixtures, Proceedings Sci. Meas. Technol. (Inst. of Electrical Engineers), [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=1903
(Accessed March 13, 2025)
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Use of an Ion Energy Analyzer-Mass Spectrometer to Measure Ion Kinetic-Energy Distributions from RF Discharges in Argon-Helium Gas Mixtures
Published
Author(s)
, , S. B. Radovanov, J. A. Rees
Citation
Proceedings Sci. Meas. Technol. (Inst. of Electrical Engineers)
Volume
141
Issue
2
Pub Type
Journals
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Created February 28, 1994, Updated October 12, 2021