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Use of an Ion Energy Analyzer-Mass Spectrometer to Measure Ion Kinetic-Energy Distributions from RF Discharges in Argon-Helium Gas Mixtures

Published

Author(s)

James K. Olthoff, Richard J. Van Brunt, S. B. Radovanov, J. A. Rees
Citation
Proceedings Sci. Meas. Technol. (Inst. of Electrical Engineers)
Volume
141
Issue
2

Citation

Olthoff, J. , Van Brunt, R. , Radovanov, S. and Rees, J. (1994), Use of an Ion Energy Analyzer-Mass Spectrometer to Measure Ion Kinetic-Energy Distributions from RF Discharges in Argon-Helium Gas Mixtures, Proceedings Sci. Meas. Technol. (Inst. of Electrical Engineers), [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=1903 (Accessed May 29, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created February 28, 1994, Updated October 12, 2021