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Displaying 54676 - 54700 of 74191

Hybrid Optical-Electrical Overlay Test Structure

January 1, 1997
Author(s)
Michael W. Cresswell, Robert Allen, L Linholm, William F. Guthrie, William B. Penzes, A Gurnell
This paper describes the exploratory use of electrical test structures to enable the calibration of optical overlay instruments of the type used to monitor semiconductor-device fabrication processes. Such optical instruments are known to be vulnerable to

Industrial Uses of STM and AFM

January 1, 1997
Author(s)
Theodore V. Vorburger, John A. Dagata, G. Wilkening, K Iizuka
We review the field of STM and AFM as applied to industrial problems, and we classify the applications into four classes: research with potential benefit to industry, research performed by industry, applications off-line in manufacturing, and applications

Inhibitor Influence on the Bistability of a CSTR

January 1, 1997
Author(s)
Valeri I. Babushok, T Noto, Donald R. Burgess Jr., Anthony P. Hamins, Wing Tsang
Methane combustion in a continuously stirred flow tank reactor (CSTR) in the presence and absence of chemical inhibitors such as CF3I, CF3Br, CF3H, and a chemically inert gas with high heat capacity is simulated with the CHEMKIN program. The aim of the

Integral Equations for Scattering by a Particle in a Layer

January 1, 1997
Author(s)
Egon Marx
The single integral equation method is applied to the scattering of electromagnetic waves by particles in a layer on top of a substrate. A second layer on top of the first one can have indentations.
Displaying 54676 - 54700 of 74191
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