January 1, 1999
Author(s)
R M. Walton, Richard E. Cavicchi, Stephen Semancik, B Panchapakesan, Don L. DeVoe, M I. Aquino-Class, J D. Allen, John S. Suehle
We describe solid state gas microsensor array technology for real-time, low-cost environmental and industrial monitoring. The four-element, surface-micromachined arrays are designed in CMOS technology and consist of multiple platforms called microhotplates