October 15, 2010
Author(s)
Thiago Cobu, Robert F. Berg, John D. Wright, Michael R. Moldover
We calibrated three models of commercially-manufactured, laminar flow meters (LFMs) with nitrogen at four pressures (100 kPa, 200 kPa, 300 kPa, and 400 kPa) over a 10:1 flow range using NISTs primary flow standards and a physical model. Without additional