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Displaying 46926 - 46950 of 74171

NIST/SEMATECH Collaboration: Application of Nano-Tips to Production CD-SEMs

January 1, 2001
Author(s)
Andras Vladar, Michael T. Postek
This is the final report of a two-part study about the application of nano-tips to critical dimension (CD) scanning electron microscope (SEMs) used in integrated circuit production. Nano-tips are essentially very sharp electron emitter tips that offer an

Odyssey Text Independent Evaluation Data

January 1, 2001
Author(s)
Mark A. Przybocki, Alvin F. Martin
We discuss the text-independent data supplied for the 2001: A Speaker Odyssey evaluation track. We cover the data creation and selection process, and we present results restricted to the Odyssey test set for participating systems in the 2000 NIST Speaker

Order-Disorder Phenomena and Phase Separation

January 1, 2001
Author(s)
Benjamin P. Burton
Order-disorder and phase separation in condensed solutions of two or more components are similar processes that are typically driven by energetics of opposite sign. The components may be: different atomic species in alloys or solid solutions; atoms and

Organic-Inorganic Hybrid Particles by Dendrimer Nanotemplating

January 1, 2001
Author(s)
F Gruhn, Barry J. Bauer, Eric J. Amis
Poly(amidoamine) (PAMAM) dendrimers are used to create organic-inorganic hybrid colloids in aqueous solution. The formation of gold colloids upon reduction of a gold salt precursor serves as a model reaction to study the influence of reaction conditions

Overlay Metrology: Recent Advances and Future Solutions

January 1, 2001
Author(s)
Richard M. Silver, Jay S. Jun, S Fox, Edward A. Kornegay
As devices shrink and clock speeds continue to increase, process control and measurement of I critical dimension linewidths and the essential overlay of features from different photolithographic levels become increasingly important. Improved manufacturing
Displaying 46926 - 46950 of 74171
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