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Displaying 40601 - 40625 of 73963

Effects of Lightpipe Proximity on Si Wafer Temperature in Rapid Thermal Processing Tools

September 1, 2003
Author(s)
Kenneth G. Kreider, D H. Chen, D P. DeWitt, William A. Kimes, Benjamin K. Tsai
curate temperature measurements are critical in rapid thermal processing (RTP) of silicon wafers for thermal oxidation and dopant anneals. Many RTP tools use lightpipe radiation thermometers (LPRTs) to measure the wafer temperatures during processing

Elastic Stiffnesses, Debye Temperatures, and T c in Cuprates

September 1, 2003
Author(s)
H M. Ledbetter, K Sudook
For cuprate superconductors and related oxides, we review some aspects of their elastic constants. We consider the systematics of the bulk-modulus/atomic-volume (B/V a) relationship. For nonsuperconducting oxides, the B-V a diagram shows that most oxides

Evaluation of Operator Interventions in Autonomous Off-Road Driving

September 1, 2003
Author(s)
Jean C. Scholtz, Brian Antonishek, J D. Young
We participated in field trials of a semi-autonomous vehicle. This gave us an opportunity to collect data on operator interventions. In this paper we present an analysis of why and how operators intervene and examine the efficiency of these interventions.

Expanding Definitions of Gain by Taking Harmonic Content into Account

September 1, 2003
Author(s)
Jeffrey Jargon, Kuldip Gupta, Alessandro Cidronali, Donald C. DeGroot
We expand the definitions of power gain, transducer gain, and available gain by taking harmonic content into account. Furthermore, we show that under special conditions, these expanded definitions of gain can be expressed in terms of nonlinear large-signal

Fast Evaluation of Next-Generation Lithographical Patterns by Small Angle X-Ray Scattering

September 1, 2003
Author(s)
T Hu, Ronald L. Jones, Wen-Li Wu, Christopher L. Soles, Eric K. Lin, M Arpan, D M. Casa
As the semiconductor industry moves to next-generation lithographies, evaluation of the patterns is more stringent. We demonstrate the capability of small angel X-ray scattering in a fast evaluation of periodicity, size of the patterns, average profile of

Form of Deprotection in Chemically Amplified Resists

September 1, 2003
Author(s)
Ronald L. Jones, T J. Hu, Vivek M. Prabhu, Christopher L. Soles, Eric K. Lin, Wen-Li Wu, D L. Goldfarb, M Angelopoulos
The push to mass production of patterns with sub-100 nm dimensions will require nanometer level control of feature size, including line edge roughness (LER). Control of LER and sidewall roughness within the length scale of individual molecules requires a

Frequency dependence of capacitance standards

September 1, 2003
Author(s)
Yicheng Wang
We measured the frequency dependence of a 10 pF transportable fused-silica capacitor from 50 Hz to 20 kHz. The results have a relative standard uncertainty of 0.32x10^(-6), 0.15x10^(-6), and 0.37x10(-6) at 100 Hz, 400 Hz, and 20 kHz, respectively. This

High-Throughput Measurements of Polymer Adhesion and Mechanical Properties

September 1, 2003
Author(s)
Christopher Stafford, Aaron M. Forster, C Harrison, Cher H. Davis, Eric J. Amis, Alamgir Karim
Polymer adhesion is important to numerous technologies including electronic packaging, coatings and paints, biomedical implants, and pressure-sensitive adhesives. The challenge is to understand the fundamental driving forces for the development of adhesive

High-Throughput Milli-Fluidic Platform for Polymer Formulations

September 1, 2003
Author(s)
Kathryn L. Beers, J Cabral, H J. Walls, Alamgir Karim, Eric J. Amis, C Harrison
Rapid prototyping of microfluidic handling devices has gained in popularity due to the ability to quickly test and modify new design features several times in one day.8-13 While elastomer-based methods have dominated the literature and are remarkably well

Immersive Virtual Reality for Steel Structures

September 1, 2003
Author(s)
Robert R. Lipman
This paper describes an immersive virtual reality system for steel structures. The system integrates standard models and formats for representing structural steel and three-dimensional graphic objects with a framework for device independent virtual

Influence of analysis Algorithms on the Value of Distorted Step Height Data

September 1, 2003
Author(s)
Ndubuisi G. Orji, Jayaraman Raja, Son H. Bui, Theodore V. Vorburger
One of the most important aspects of step height evaluation are the analysis algorithms used. There algorithms assume that the profiles and images being analyzed are ideal, but real step profiles are not ideal and the analysis algorithms can influence the

Influence of Roughness on Wear Transition in Glass-Infiltrated Alumina

September 1, 2003
Author(s)
Sergei Kalinin, S Jahanmir
The wear behavior of glass-infiltrated alumina was evaluated in sliding against a high purity alumina in water using a pin on disk tribometer. Three disk surface roughness values were used, i.e., 14 nm, 146 nm and 649 nm Ra. The wear rate of both the

Intelligent Systems for Urban Search and Rescue: Challenges and Lessons Learned

September 1, 2003
Author(s)
Adam S. Jacoff, Elena R. Messina, Brian A. Weiss
Urban search and rescue (USAR) is one of the most dangerous and time-critical non-wartime activities. Researchers have been developing hardware and software to enable robots to perform some search and rescue functions so as to minimize the exposure of

Interdiffusion in Polystyrene and End-Functional Polystyrene Thin Films Near a Solid Surface

September 1, 2003
Author(s)
C M. Wang, Vivek Prabhu, Christopher Soles, B D. Vogt, Wen-Li Wu, Eric K. Lin, Sushil K. Satija
Polymer interdiffusion near the polymer/solid interface is studied using neutron reflectometry. Bilayers of hydrogenated polystyrene (hPS) and deuterated polystyrene (dPS) or hydrogenated dicarboxy terminated polystyrene (hPS(COOH)2) and dPS are prepared
Displaying 40601 - 40625 of 73963
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