August 20, 2009
Author(s)
Wei Chu, Joseph Fu, Ronald G. Dixson, Ndubuisi G. Orji, Theodore V. Vorburger
Many scanning probe microscopes (SPMs), such as the scanning tunneling microscope (STM) and atomic force microscope (AFM), use piezoelectric actuators operating in open loop for generating the scans of the surfaces. However, nonlinearities mainly caused by