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Displaying 27126 - 27150 of 73960

Sub-50 nm measurements using a 193 nm angle-resolved scatterfield microscope

April 1, 2010
Author(s)
Richard Quintanilha, Martin Y. Sohn, Bryan M. Barnes, Richard M. Silver
Resist-on-silicon sub-50 nm targets have been investigated using a 193 nm angle-resolved scatter field microscope(ARSM). The illumination path of this microscope allows customization of the Conjugate Back Focal Plane (CBFP) while separate collection paths

The Limits and Extensibility of Optical Patterned Defect Inspection

April 1, 2010
Author(s)
Richard M. Silver, Bryan M. Barnes, Martin Y. Sohn, Richard Quintanilha, Hui Zhou, Chris Deeb, Mark Johnson, Milton Goodwin, Dilip Patel
New techniques recently developed at the National Institute of Standards and Technology using bright field optical tools are applied to signal-based defect analysis of features with dimensions well below the measurement wavelength. A key to this approach

Wireless Sensor Network Performance Metrics for Building Applications

April 1, 2010
Author(s)
Won Suk Jang, William M. Healy
Metrics are investigated to help assess the performance of wireless sensors in buildings. Wireless sensor networks present tremendous opportunities for energy savings and improvement in occupant comfort in buildings by making data about conditions and

Calibration of 1 nm SiC Step Height Standards

March 31, 2010
Author(s)
Theodore V. Vorburger, Albert M. Hilton, Ronald G. Dixson, Ndubuisi G. Orji, J. A. Powell, A. J. Trunek, P. G. Neudeck, P. B. Abel
We aim to develop and calibrate a set of step height standards to meet the range of steps useful for nanotechnology. Of particular interest to this community is the calibration of atomic force microscopes operating at their highest levels of magnification

Clifford Glenwood Shull

March 31, 2010
Author(s)
Robert D. Shull
In 1975 Clifford Glenwood Shull was elected to membership in the National Academy of Science. He had earlier, 1956, been admitted to the American Academy of Arts and Sciences, and would in 1994 be awarded the Nobel Prize in Physics. These and other honors

Estimation of the Enhancement Factor for Mercury in Air

March 31, 2010
Author(s)
Allan H. Harvey
A combination of classical thermodynamics and molecular theory was used to calculate the enhancement factor (ratio of partial pressure to saturated vapor pressure) for liquid mercury in equilibrium with air at standard atmospheric pressure in the

Performance Evaluation and Benchmarking of Robotic and Automation Systems

March 31, 2010
Author(s)
Rajmohan Madhavan, Elena R. Messina, Angel P. Del Pobil
The Technical Committee on Performance Evaluation and Benchmarking for Robotic and Automation Systems (TC-PEBRAS) was approved at the Technical Activities Board (TAB) meeting held at the 2009 International Conference on Robotics and Automation (ICRA) in

Proximity-associated errors in contour metrology

March 31, 2010
Author(s)
John S. Villarrubia, Ronald G. Dixson, Andras Vladar
In contour metrology the CD-SEM (critical dimension scanning electron microscope) assigns a continuous boundary to extended features in an image. The boundary is typically assigned as a simple function of the signal intensity, for example by a brightness

Sensitivity of coherent dual-comb spectroscopy

March 31, 2010
Author(s)
Nathan R. Newbury, Ian R. Coddington, William C. Swann
Coherent dual comb spectroscopy can provide high-resolution, high-accuracy measurements of a sample response in both magnitude and phase. We discuss the achievable signal-to-noise ratio (SNR) due to both additive white noise and multiplicative noise, and

A Report on the Privilege (Access) Management Workshop

March 30, 2010
Author(s)
Annie W. Sokol
This document is based on the discussions and conclusions of the Privilege (Access) Management Workshop held on 1-3 September, 2009 at the Gaithersburg, Maryland facilities of the National Institute of Standards and Technology (NIST), sponsored by NIST and

Analysis of photoconductive gain as it applies to single-photon detection

March 30, 2010
Author(s)
Mary A. Rowe, G. M. Salley, E. J. Gansen, Shelley M. Etzel, Sae Woo Nam, Richard P. Mirin
We detail a mathematical framework for photoconductive gain applied to the detection of single photons. Because photoconductive gain is derived from the ability to measure current change for an extended period, its magnitude is reduced as detection speed

Data Loss Prevention

March 29, 2010
Author(s)
Simon Liu, D. Richard Kuhn
In today's digital economy, data enters and leaves enterprises' cyberspace at record rates. For a typical enterprise, millions of emails are sent and received and thousands of files are downloaded, saved or transferred via various channels or devices on a

Effect of N-Terminal Glutamic Acid and Glutamine on Fragmentation of Peptide Ions

March 27, 2010
Author(s)
Bhaskar Godugu, Pedatsur Neta, Yamil Simon, Stephen Stein
A prominent dissociation path for electrospray generated tryptic peptide ions is the dissociation of the peptide bond linking the second and third residues from the amino-terminus. The formation of the resulting b 2 and y n-2 fragments has been

AP210 Edition 2 Concept of Operations

March 26, 2010
Author(s)
Kevin G. Brady, Jamie Stori, Thomas Thurman
One of the most prevalent requirements of manufacturing industries today is the need to exchange and share product information within and between enterprises. This becomes almost impossible without a standardized, computer-interpretable method of
Displaying 27126 - 27150 of 73960
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