April 30, 2013
Author(s)
Ravikiran Attota, Haesung Park, Victor H. Vartanian, Ndubuisi G. Orji, Richard A. Allen
… changes at the nanoscale, such as small perturbations in sidewall angle and height, with little or no ambiguity, … time, is particularly important for high volume manufacturing. For example, TSOM has been demonstrated to show sensitivity to nanometer-scale changes in height. These two attributes make TSOM particulary …