July 1, 2000
Author(s)
Kristine A. Bertness, J T. Armstrong, Ryna B. Marinenko, Larry Robins, Albert J. Paul, Joseph G. Pellegrino, Paul M. Amirtharaj, Deane Chandler-Horowitz
… of AlGaAs layers during epitaxial crystal growth using in situ normal-incidence optical reflectance supported by … AlGaAs, composition measurement, compound semiconductors, in situ monitoring, molecular beam epitaxy, optical … Conf. Dig., LEOS Summer Topical on Optical Sensing in Semiconductor Manufacturing …