December 1, 2001
Author(s)
Charles S. Tarrio, Thomas B. Lucatorto, S Grantham, M B. Squires, Uwe Arp, Lu Deng
… Facility at the National Institute of Standards and Technology. The chamber replaces a much smaller system on … of normal-incidence extreme ultraviolet optics used in lithography development, astronomy, and plasma physics. … measurement chamber was limited to optics less than 10 cm in diameter, and, thus, we were not able to measure many fo …