March 1, 2003
Author(s)
Jabez J. McClelland, W Anderson, C Bradley, M Walkiewicz, R Deslattes, E Jurdik, Robert Celotta
… Journal of Research of the National Institute of Standards and Technology … atomic ruler, chromium lines, laser focusing, nanoscale standards, nanotechnology, pitch standards … Accuracy of Nanoscale Pitch Standards Fabricated by Laser-Focused Atomic Deposition …