July 1, 1999
Author(s)
F Perez-murano, K Birkelund, K Morimoto, John A. Dagata
… Scanned probe microscope (SPM) oxidation with voltage modulation leads to a significant … modulation overcomes the self-limiting character of SPM oxidation by reducing the buildup of space charge within the … elemental semiconductors, nanotechnology, oxidation, scanning probe microscopy, silicon, space charge …