Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Nanoscale Oxidation of Zirconium Surfaces: Kinetics and Mechanisms



Natalia Farkas, Li Zhang, E A. Evans, R Ramsier, John A. Dagata


We show that AFM-induced oxide features can be reproducibly formed on both Zr and ZrN surfaces, and that the growth rate decreases rapidly with increasing time. There is an increase in oxide-feature height with humidity for both systems, and an approximately linear dependence of the height of the structures on the applied voltage for all films for short exposure times. As the anodization time increases, the thinnest (6 nm) films show a large enhancement in oxide-feature height whereas the behavior of the other films is unchanged, demonstrating the role of the film/substrate interface. Under the same conditions, the height of features grown on ZrN films is greater than for those grown on Zr films, indicating that nitrogen plays a role in the oxidation process.
Journal of Vacuum Science and Technology A
No. 4


atomic force microscopy, local oxidation, zirconium, zirconium nitride


Farkas, N. , Zhang, L. , Evans, E. , Ramsier, R. and Dagata, J. (2003), Nanoscale Oxidation of Zirconium Surfaces: Kinetics and Mechanisms, Journal of Vacuum Science and Technology A (Accessed July 23, 2024)


If you have any questions about this publication or are having problems accessing it, please contact

Created June 30, 2003, Updated October 12, 2021