September 27, 2010
Author(s)
Ginusha M. Perera, Gila E. Stein, James Alexander Liddle
… were detected in the tool studied, (62  2) Hz and (86 +/- 3) Hz, and the tool manufacturer identifi ed likely noise … standard deviation in the grating pitch. Errors due to the 86 Hz noise ranged from 3s = 1.5 nm to 2.5 nm. Variations of …