February 16, 2016
Author(s)
Yuriy Suhak, Michal Schulz, Hendrik Wulfmeier, Ward Johnson, Andrei Sotnikov, Hagen Schmidt, Steffen Ganschow, Detlef Klimm, Holger Fritze
Operation of single crystalline Ca3TaGa3Si2O14 (CTGS) and La3Ga5SiO14 (LGS) bulk acoustic wave resonators is demonstrated up to 1270 °C and 1470 °C, respectively. The mass sensitivity of such devices is about 35 cm^2Hz/ug at 800 °C. Therefore, they are