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PUBLICATIONS

Evaluation of Effect of Data Quality on the Profile Uncertainty of Critical Dimension Small Angle X-ray Scattering

Published

Author(s)

Daniel F. Sunday, Scott List, Jasmeet Chawla, Regis J. Kline
Citation
Journal of Microlithography Microfabrication and Microsystems
Pub Type
Journals
Semiconductors and Dimensional metrology

Citation

Sunday, D. , List, S. , Chawla, J. and Kline, R. (2016), Evaluation of Effect of Data Quality on the Profile Uncertainty of Critical Dimension Small Angle X-ray Scattering, Journal of Microlithography Microfabrication and Microsystems (Accessed October 28, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created February 17, 2016, Updated February 19, 2017
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