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Evaluation of Effect of Data Quality on the Profile Uncertainty of Critical Dimension Small Angle X-ray Scattering

Published

Author(s)

Daniel F. Sunday, Scott List, Jasmeet Chawla, Regis J. Kline
Citation
Journal of Microlithography Microfabrication and Microsystems

Citation

Sunday, D. , List, S. , Chawla, J. and Kline, R. (2016), Evaluation of Effect of Data Quality on the Profile Uncertainty of Critical Dimension Small Angle X-ray Scattering, Journal of Microlithography Microfabrication and Microsystems (Accessed March 2, 2024)
Created February 17, 2016, Updated February 19, 2017