TY - JOUR AU - Daniel Sunday AU - Scott List AU - Jasmeet Chawla AU - Regis Kline C2 - Journal of Microlithography Microfabrication and Microsystems DA - 2016-02-17 LA - en PB - Journal of Microlithography Microfabrication and Microsystems PY - 2016 TI - Evaluation of Effect of Data Quality on the Profile Uncertainty of Critical Dimension Small Angle X-ray Scattering ER -