@article{217441, author = {Daniel Sunday and Scott List and Jasmeet Chawla and Regis Kline}, title = {Evaluation of Effect of Data Quality on the Profile Uncertainty of Critical Dimension Small Angle X-ray Scattering}, year = {2016}, month = {2016-02-17}, publisher = {Journal of Microlithography Microfabrication and Microsystems}, language = {en}, }