June 1, 2001
Author(s)
Stephen Semancik, Richard E. Cavicchi, M C. Wheeler, J E. Tiffany, G Poirier, R M. Walton, John S. Suehle, B. Panchapakesan, D. E. DeVoe
This paper describes the development and use of microdevices and microarrays in chemical sensor research. The surface-micromachined microhotplate structure common within the various platforms included here was originally designed for fabricating