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Neutron Activation Analysis for Calibration of Phosphorus Implantation Dose

Published

Author(s)

Rick L. Paul, David S. Simons
Citation
Characterization and Metrology for ULSI Technology 2000: International Conference (AIP Conference Proceedings)
Volume
550
Publisher Info
American Institute of Physics, Melville, NY

Citation

Paul, R. and Simons, D. (2001), Neutron Activation Analysis for Calibration of Phosphorus Implantation Dose, American Institute of Physics, Melville, NY (Accessed April 23, 2024)
Created March 1, 2001, Updated February 19, 2017