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Journals

Towards Multiprocessor Feature Recognition

Author(s)
William Regli, Satyandra K. Gupta, D Nau
The availability of low-cost computational power is enabling the development of increasingly sophisticated CAD software. Automation of design and manufacturing...

A Repository for Design, Process Planning and Assembly

Author(s)
William Regli, Daniel M Gaines
This paper provides an introduction to the Design, Planning and Assembly Repository available through the National Institute of Standards and Technology (NIST)...

Industrial Uses of STM and AFM

Author(s)
Theodore V. Vorburger, John A. Dagata, G. Wilkening, K Iizuka
We review the field of STM and AFM as applied to industrial problems, and we classify the applications into four classes: research with potential benefit to...

Hybrid Optical-Electrical Overlay Test Structure

Author(s)
Michael W. Cresswell, Robert Allen, L Linholm, William F. Guthrie, William B. Penzes, A Gurnell
This paper describes the exploratory use of electrical test structures to enable the calibration of optical overlay instruments of the type used to monitor...

A Differential Wavelength Meter for Laser Tuning

Author(s)
Lowell P. Howard, Jack A. Stone Jr.
A simple interferometer for matching the wavelengths of tunable lasers is described. Our interferometer uses the angular dispersion of a diffraction grating at...
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