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Journals

Test Optics Error Removal

Author(s)
Christopher J. Evans, R Kestner
Wave-front or surface errors may be divided into rotationally symmetric and nonrotationally symmetric terms. It is shown that if either the test part or the

Migration Plan for Product Data Standards

Author(s)
Mary Mitchell, William Gruttke
A significant benefit of using standards is that standards ease the migration from one computing environment to another. But what happens when the migration if

A critical evalution of thermal mass flow meters

Author(s)
S A. Tison
Many semiconductor processes require that stable and known flows of gas be delivered to the processing chamber. The thermal mass flow meter (TMFM) is used almost
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