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Journals

A critical evalution of thermal mass flow meters

Author(s)
S A. Tison
Many semiconductor processes require that stable and known flows of gas be delivered to the processing chamber. The thermal mass flow meter (TMFM) is used almost

Rapid Discharge of a Fire Suppressing Agent

Author(s)
Jiann C. Yang, William M. Pitts, B D. Breuel, William L. Grosshandler, W G. Cleveland
This paper describes an experimental method to study the rapid discharge of a fire suppressant (C3F8) from a pressurized vessel. Experimental observations

Laser Focusing of Atoms for Nanostructure Fabrication

Author(s)
Jabez J. McClelland, R Gupta, Zeina J. Kubarych, Robert Celotta
Laser-focusing of atoms has emerged as a viable form of nanofabrication. Structures are formed by focusing chromium atoms as they deposit onto a surface. The
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