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Journals

Application of Transmission Electron Detection to SCALPEL Mask Metrology

Author(s)
R Farrow, Michael T. Postek, William J. Keery, Samuel N. Jones, J R. Lowney, M Blakey, L Fetter, J Griffith, J E. Liddle, L C. Hopkins, H A. Huggins, M Peabody, A Novembre
Linewidth measurements were performed on a 4X scattering with angular limitation in projection electron lithography (SCALPEL) e-beam lithography mask using the

Uncertainty and Dimensional Calibrations

Author(s)
Theodore D. Doiron, John R. Stoup
The calculation of uncertainty for a measurement is an effort to set reasonable bounds for the measurement result according to standardized rules. Since every

Application of Trasmission Electron Detection to Scalpel Mask Metrology

Author(s)
R Farrow, Michael T. Postek, William J. Keery, Samuel N. Jones, J R. Lowney, M Blakey, L Fetter, A Liddle, L C. Hopkins, H A. Huggins, M Peabody, A Novembre, J Griffith
Linewidth measurements were performed on a 4X scattering with angular limitation in projection electron lithography (SCALPEL) e-beam lithography mask using the

TEM and EELS Investigation of a-C and ta-C Coated Field Emitters

Author(s)
Alline F. Myers, Eric B. Steel, M Q. Ding, S M. Camphausen, W B. Choi, J J. Cuomo, J J. Hren
The microstructure of highly sp 2 bonded amorphous carbon (a-C) and partially tetrahedrally bonded amorphous carbon (ta-C) films deposited on needle-shaped Mo

Make Me a Match

Author(s)
Isabel M. Beichl, F Sullivan
This is a tutorial article on the Hopcroft-Karp algorithm for finding a maximal matching in an undirected graph.
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