Germer, T.
(1998),
Application of bidirectional ellipsometry to the characterization of roughness and defects in dielectric layers, ed. by J. C. Stover, SPIE
(Accessed December 4, 2023)
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Application of bidirectional ellipsometry to the characterization of roughness and defects in dielectric layers, ed. by J. C. Stover
Published
Author(s)
Citation
SPIE
Volume
3275
Pub Type
Journals
Citation
Created January 1, 1998, Updated February 17, 2017