Germer, T.
(1998),
Application of bidirectional ellipsometry to the characterization of roughness and defects in dielectric layers, ed. by J. C. Stover, SPIE
(Accessed March 15, 2026)
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Application of bidirectional ellipsometry to the characterization of roughness and defects in dielectric layers, ed. by J. C. Stover
Published
Author(s)
Citation
SPIE
Volume
3275
Pub Type
Journals
Citation
Issues
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Created January 1, 1998, Updated February 17, 2017