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Journals

Application of a CMP Model to Tungsten CMP

Author(s)
E W. Paul
A general model of chemical mechanical polishing (CMP) has been derived which shows the dependence of the polishing rate on the concentration of chemicals and...

Sounds of Atoms: Life in Science

Author(s)
Stephan J. Stranick
Early in setting up our nanoscience laboratory at Penn State, we were frustrated because we could not peer into the tunneling junctions of our scanning...
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