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Combinatorial study of the crystallinity boundary in the HfO2-TiO2-Y2O3 system using pulsed laser deposition library thin films



Peter K. Schenck, Jennifer L. Klamo, Nabil Bassim, Peter G. Burke, Yvonne B. Gerbig, Martin L. Green


HfO2-TiO2-Y2O3 is an interesting high-k dielectric system.  Combinatorial library films of this system enable the study of the role of composition on phase formation as well as optical and mechanical properties.  A library film of this system deposited at 400ºC exhibited a boundary line evident visually as well as in optical characterization.  Mapping x-ray analysis showed the line corresponds to a crystallinity boundary, separating an amorphous phase and a FCC crystalline phase of yttrium hafnium oxide.  Mapping nanoindentation across the boundary also revealed a sharp change in mechanical properties.  The combinatorial technique is a powerful tool for high-throughput materials science, and by realizing this particularly unique PLD library film, allows many interesting materials phenomena and properties to be measured.
Thin Solid Films


Combinatorial, Thin films, Reflectometry, X-ray diffraction, Nanoindentation
Created May 16, 2008, Updated February 19, 2017