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Journals

Integrating DFM with CAD through Design Critiquing

January 1, 1994

Author(s)

Satyandra K. Gupta, William Regli, D Nau

The increasing focus on design for manufacturability (DFM) in research in concurrent engineering design is expanding the scope of traditional design activities...

Strategy for Post-Process Control of a Machine Tool

January 1, 1994

Author(s)

Theodore V. Vorburger, K Yee, Brian R. Scace, F Rudder

The automated control of machine-tool accuracy is discussed based on a quality architecture containing three control loops: real-time, process-intermittent, and...

Methods Divergence Between Measurements of Micrometer and Sub-Micrometer Surface Features

January 1, 1994

Author(s)

T Mcwaid, Theodore V. Vorburger, Joseph Fu, Jun-Feng Song, Eric P. Whitenton

Measurements of micrometer and sub-micrometer surface features have been made using a stylus profiler, an STM, an AFM, and a phase-measuring interferometric...

Electron Beam Interaction Modeling as Applied to X-Ray Lithography Mask SEM Linewidth Metrology

January 1, 1994

Author(s)

Michael T. Postek, J R. Lowney, Andras Vladar, William J. Keery, Egon Marx, Robert D. Larrabee

This work provides an approach to improved x?ray mask linewidth metrology and a more precise edge location algorithm for measurement of feature sizes on x?ray...

A Novel CMM Interim Testing Artifact

January 1, 1994

Author(s)

Steven D. Phillips, Bruce R. Borchardt, Gregory W. Caskey, David E. Ward, Bryon S. Faust, Daniel S. Sawyer

NIST is currently developing equipment and techniques to rapidly access the performance of Coordinate Measuring machines (CMMs). This will allow the frequent...

Ultrashallow Depth Profiling with Time-of-flight Secondary Ion Mass Spectrometry

January 1, 1994

Author(s)

J. Bennett, John A. Dagata

Time-of-flight secondary ion mass spectrometry (TOF-SIMS) is an efficient, sensitive method for characterizing semiconductor surfaces. In addition, TOF-SIMS can...

Fiber Splice Loss: A Simple Method of Calculation

January 1, 1994

Author(s)

R. L. Gallawa, A. R. Kumar, Andreas Weisshaar

Error Propagation in Laser Beam Spatial Parameters

January 1, 1994

Author(s)

Richard D. Jones, Thomas Scott

Visual Tracking for Autonomous Driving

December 31, 1993

Author(s)

H Schneiderman, M Nashman

Hg1-xCdxTe Characterization Measurements: Current Practice and Future Needs

December 31, 1993

Author(s)

David G. Seiler, Santos D. Mayo, J R. Lowney

Hot-Electron Microcalorimeters for X-Ray and Phonon Detection

December 31, 1993

Author(s)

M. Nahum, John M. Martinis, S. Castles

Even-Odd Symmetry Breaking in the NSN Coulomb Blockade Electrometer

December 31, 1993

Author(s)

Travis M. Eiles, John M. Martinis, Michel H. Devoret

Optical Conductivity of Single Crystals of Ba1-xMxBiO₃ (M=K, Rb, 0.35

December 31, 1993

Author(s)

S. Guha, D. Peebles, V. M. Browning, T. Wieting, Deane Chandler-Horowitz, M. Norton

Characterization of Interface Defects in SIMOX Films

December 31, 1993

Author(s)

Santos D. Mayo, J R. Lowney, Peter Roitman

RII Spectroscopy of Trap Levels in Bulk and LPE Hg_1-xCdxTe

December 31, 1993

Author(s)

Chris L. Littler, X. N. Song, Z. Yu, J. L. Elkind, J R. Lowney, David G. Seiler

Interface Sharpness During the Initial Stages of Growth of Thin, Short-Period III-V Superlattices

December 31, 1993

Author(s)

Joseph G. Pellegrino, S. B. Qadri, C. M. Cotell, Paul M. Amirtharaj, Nhan Van Nguyen, J. Comas

Suitability of Metalorganic Chemical Vapor Deposition-Derived PrGaO₃ Films as Buffer Layers for YBa₂Cu₃O_7-x Pulsed Laser Deposition

December 27, 1993

Author(s)

Bao Shan Han, D. A. Neumayer, T P. Ma, David A. Rudman, Xuhang Tong, V. P. Dravid

Shape Selectivity in Reversed-Phase Liquid Chromatography for the Separation of Planar and Nonplanar Solutes

December 17, 1993

Author(s)

Lane C. Sander, Stephen A. Wise

Effect of Environmental Noise on the Accuracy of Coulomb-Blockade Devices

December 15, 1993

Author(s)

John M. Martinis, M. Nahum

High-Sensitivity Optical Sampling Using an Erbium-Doped Fiber Laser Strobe

December 5, 1993

Author(s)

John B. Schlager, Paul D. Hale, Douglas L. Franzen

Standards Reference Materials for the Determination of Polycyclic Aromatic Hydrocarbons in Environmental Samples - Current Activities

December 1, 1993

Author(s)

Stephen A. Wise, Michele M. Schantz, Bruce A. Benner Jr, Reenie M. Parris, R. E. Rebbert, Lane C. Sander, Barbara J. Porter, S. N. Chesler, Willie E. May

Thermal Isolation of High-Temperature Superconducting Thin Films Using Silicon Wafer Bonding and Micromachining

December 1, 1993

Author(s)

Joseph P. Rice, David A. Rudman, C. A. Bang, M. I. Flik, M. A. Schmidt

Stacking Fault Pyramid Formation and Energetics in Silicon-on-Insulator Material Formed by Cycles of Oxygen Implantation and Annealing

December 1, 1993

Author(s)

J. H. Lee, J Park, D. Venables, S. J. Krause, Peter Roitman

Importance of Unraveling Memory Propagation Effects in Interpreting Data on Partial Discharge Statistics

December 1, 1993

Author(s)

Richard J. Van Brunt, E. W. Cernyar, P. Von

Using characterized variable reservoir helium permeation leaks to generate low flows

November 27, 1993

Author(s)

S A. Tison, Pardeep Mohan

Fixed reservoir helium permeation leaks are frequently used to generate known flows for calibration of leak detectors. Determination of the flow from helium...

Sidejet Strength and Mixing in Self-Excited Jets. [Abstract ONLY]

November 21, 1993

Author(s)

A W. Johnson, William M. Pitts

Absolutely unstable jet flows are known to produce vigorous and intermittent lateral ejections of fluid, or 'sidejets'. Sidejet generation has been attributed...

Spin-resolved Superelastic Electron Scattering from Laser Excited Chromium Atoms

November 14, 1993

Author(s)

G Hanne, Jabez J. McClelland, R E. Scholten, Robert Celotta

Superelastic scattering of polarized electrons from laser-excited polarized chromium atoms (4 7P o 4 rarr} 4 7S 3 transition, energy gain 2.92 eV) has been...