Nguyen, N.
, Chandler-Horowitz, D.
, Amirtharaj, P.
and Pellegrino, J.
(1994),
Spectroscopic Ellipsometry Determination of the Properties of the Thin Underlying Strained Si Layer and the Roughness at SiO<sub>2</sub>/Si Interface, Applied Physics Letters
(Accessed April 24, 2024)
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Spectroscopic Ellipsometry Determination of the Properties of the Thin Underlying Strained Si Layer and the Roughness at SiO2/Si Interface
Published
Author(s)
, , , Joseph G. Pellegrino
Citation
Applied Physics Letters
Volume
64
Issue
20
Pub Type
Journals
Citation
Created May 15, 1994, Updated October 12, 2021