Nguyen, N.
, Chandler-Horowitz, D.
, Amirtharaj, P.
and Pellegrino, J.
(1994),
Spectroscopic Ellipsometry Determination of the Properties of the Thin Underlying Strained Si Layer and the Roughness at SiO<sub>2</sub>/Si Interface, Applied Physics Letters
(Accessed January 19, 2025)
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Spectroscopic Ellipsometry Determination of the Properties of the Thin Underlying Strained Si Layer and the Roughness at SiO2/Si Interface
Published
Author(s)
, , , Joseph G. Pellegrino
Citation
Applied Physics Letters
Volume
64
Issue
20
Pub Type
Journals
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created May 15, 1994, Updated October 12, 2021