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Spectroscopic Ellipsometry Determination of the Properties of the Thin Underlying Strained Si Layer and the Roughness at SiO2/Si Interface

Published

Author(s)

Nhan Van Nguyen, Deane Chandler-Horowitz, Paul M. Amirtharaj, Joseph G. Pellegrino
Citation
Applied Physics Letters
Volume
64
Issue
20

Citation

Nguyen, N. , Chandler-Horowitz, D. , Amirtharaj, P. and Pellegrino, J. (1994), Spectroscopic Ellipsometry Determination of the Properties of the Thin Underlying Strained Si Layer and the Roughness at SiO<sub>2</sub>/Si Interface, Applied Physics Letters (Accessed May 30, 2024)

Issues

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Created May 15, 1994, Updated October 12, 2021