@article{845826,
  author = {Nhan Nguyen and Deane Chandler-Horowitz and Paul Amirtharaj and Joseph Pellegrino},
  title = {Spectroscopic Ellipsometry Determination of the Properties of the Thin Underlying Strained Si Layer and the Roughness at SiO<sub>2</sub>/Si Interface},
  year = {1994},
  number = {64},
  month = {1994-05-16 00:05:00},
  publisher = {Applied Physics Letters},
  language = {en},
}