TY  - JOUR
AU  - Nhan Nguyen
AU  - Deane Chandler-Horowitz
AU  - Paul Amirtharaj
AU  - Joseph Pellegrino
C2  - Applied Physics Letters
DA  - 1994-05-16 00:05:00
LA  - en
M1  - 64
PB  - Applied Physics Letters
PY  - 1994
TI  - Spectroscopic Ellipsometry Determination of the Properties of the Thin Underlying Strained Si Layer and the Roughness at SiO<sub>2</sub>/Si Interface
ER  -