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Conferences

Patterned Defect & CD Metrology by TSOM Beyond the 22 nm Node

Author(s)
Ravikiran Attota, Abraham Arceo, Benjamin Bunday, Victor Vertanian
Through-focus scanning optical microscopy (TSOM) is a novel method [1-8] that allows conventional optical microscopes to collect dimensional information down to...

On CD-AFM bias related to probe bending

Author(s)
Vladimir A. Ukraintsev, Ndubuisi George Orji, Theodore V. Vorburger, Ronald G. Dixson, Joseph Fu, Richard M. Silver
Critical Dimension AFM (CD-AFM) is a widely used reference metrology. To characterize modern semiconductor devices, very small and flexible probes, often 15 nm...

OVERVIEW OF THE TESTING PROGRAM ON FIBERS USED IN BALLISTIC APPLICATIONS

Author(s)
Amanda L. Forster, Haruki Kobayashi, Jae H. Kim, Michael A. Riley, Joy Dunkers, Scott Wight, Kirk D. Rice, Gale A. Holmes
The goal of this paper and presentation is to give an overview of the research effort to date being conducted at the National Institute of Standards and...

Modeling for Optimal Ambulance Patient Compartment Layout

Author(s)
Deogratias Kibira, Yung-Tsun Lee, Mehdi Dadfarnia
This paper describes how modeling and simulation can play a major role in developing standards recommendations for patient compartment layout of automotive...

SEM imaging of ultra-high aspect ratio hole features

Author(s)
John S. Villarrubia, Aron Cepler, Benjamin D. Bunday, Bradley Thiel
In-line, non-destructive process control metrology of high aspect ratio (HAR) holes and trenches has long been a known gap in metrology. Imaging the bottoms of...

Modeling for Optimal Ambulance Patient Compartment Layout

Author(s)
Deogratias Kibira, Yung-Tsun T. Lee, Mehdi Dadfarnia
This paper describes how modeling and simulation can play a major role in developing standards recommendations for patient compartment layout of automotive...

In Situ Raman Monitoring of Ring-Opening Copolymerizations

Author(s)
Matthew T. Hunley, Santanu S. Kundu, Peter M. Johnson, Kathryn Beers
Recent advances in enzyme, metal, and organic catalysts have enabled the development of advanced functional polymers from cyclic ester and cyclic carbonate...
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