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Aaron Katzenmeyer, Michael Titze, Sam Frisone, Tony Ohlhausen, Anthony Flores, Deanna Campbell, Bingjun Li, Yongqiang Wang, Jung Han, Edward Bielejec, Rachel Goldman
We compare the suitability of various magnesium-based liquid metal alloy ion sources (LMAIS) for scalable focused-ion-beam (FIB) implantation doping of GaN. We