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Search Publications by: Aaron Katzenmeyer (Fed)

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Comparison of Mg-based liquid metal ion sources for scalable focused-ion-implantation doping of GaN

April 18, 2024

Author(s)

Aaron Katzenmeyer, Michael Titze, Sam Frisone, Tony Ohlhausen, Anthony Flores, Deanna Campbell, Bingjun Li, Yongqiang Wang, Jung Han, Edward Bielejec, Rachel Goldman

We compare the suitability of various magnesium-based liquid metal alloy ion sources (LMAIS) for scalable focused-ion-beam (FIB) implantation doping of GaN. We consider GaMg, MgSO4•7H2O, MgZn, AlMg, and AuMgSi alloys. Although issues of oxidation (GaMg)