Journal of Research (NIST JRES)

Design, Manufacturing, and Inspection Data for a Three-Component Assembly

February 12, 2019
Thomas D. Hedberg, Michael E. Sharp, Toby M. Maw, Mostafizur M. Rahman, Swati Jadhav, James J. Whicker, Allison Barnard Feeney, Moneer M. Helu
To better understand and address the challenges faced in linking all stages of a manufacturing and design process, an investigative fabrication process was...

X-ray Metrology for the Semiconductor Industry Tutorial

February 01, 2019
Daniel F. Sunday, Wen-Li Wu, Scott Barton, Regis J. Kline
The semiconductor industry is in need of new, in-line dimensional metrology methods with higher spatial resolution for characterizing their next generation...