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Physical Measurement Laboratory / Sensor Science Division

Optical Radiation Group

Tools and Instruments

Displaying 1 - 16 of 16
Beamline 7

Beamline 7: EUV reflectometry

The NIST/DARPA EUV Reflectometry facility began in the late 1980's to make measurements of the reflectivity of EUV multilayer optics for lithography. Since then

NIST Gonio-spectroradiometer

The NIST gonio-spectroradiometer is used to measure total spectral radiant flux (TSRF) of incandescent lamps. The instrument consists of a 3-axis scanning
Plot of Si photodiode typical responsivity in EUV

Si EUV Photodiode Transfer Standard

Silicon (Si) photodiodes are issued by NIST as transfer standard detectors throughout the extreme ultraviolet spectral region (5 nm to 254 nm). Each device is

Spectral comparator facilities

Visible to near-infrared spectral comparator facility (Vis/NIR SCF) The Vis/NIR SCF is a monochromator-based system that typically measures the spectral power

Spectrally tunable lighting facility

Solid-state lighting (SSL) is increasingly being introduced into the market and it is expected that many of the light sources currently used for general
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