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Metrology

Electrical / electromagnetic metrology

Projects/Programs

Keyword

Organizational Unit

Transport Property Measurements for Semiconductors and Energy Materials

Ongoing

The properties of materials and interfaces that govern reliability, performance, and thermal transport in advanced microelectronic packages are not fully characterized or understood, especially at device length scales wherein properties may differ significantly from bulk or literature values

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NIST Headquarters
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---Chemical Sciences Division
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---Microelectronics Manufacturing Division
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