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Projects/Programs: Grand Challenge 3: Enabling Metrology for Integrating Components in Advanced Packaging

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CalNet

Ongoing
Electronics engineers use on-wafer calibration die to calibrate measurement equipment before characterizing or modeling semiconductor devices. While NIST pioneered on-wafer calibrations in the 1990’s, most industrial labs use commercial ‘Impedance Standard Substrates’ (ISS) that are manufactured by

Metrology for Integration of New Magnetic Materials

Ongoing
Integration of magnetic materials remains a key challenge facing advanced packaging technologies. High power applications require voltage conversion at or near the die, and most practical power converters rely on inductors. Beyond power electronics, integration of magnetic components such as

Nanoscale, Element-Specific X-ray Imaging for Integrated Circuit Metrology

Ongoing
Industry roadmaps identify the characterization of nanoscale subsurface feature shape and composition as a measurement need for the semiconductor industry. However, IC interiors are difficult to probe post-manufacturing due to the presence of many close-packed and nanoscale subsurface features, of