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SRI 6006 Precision Micro-machined Apertures
Technical Contact: nathan.tomlin [at] nist.gov (Nathan Tomlin)
Precision micro-machined apertures are fabricated from silicon on insulator (SOI) wafers. Lithographic processing allows great flexibility in the aperture design, enabling precise placement of apertures, through holes, and chip outlines. Optionally, metal can be deposited for low emissivity and multiwall vertically-aligned carbon nanotubes can be grown for high emissivity.
Specifications Certificate (PDF format)
Standard Configurations
The prices listed below are for the individual instrument and do not include costs related to the final measurement calibration performed before delivery or post-delivery installation and training. The related Calibration Service ID for the SRI is 10022S. To obtain a quote for the instrument and calibration services, please contact Sales and Customer Service by phone at 301-975-2200 or email at srminfo [at] nist.gov (srminfo[at]nist[dot]gov (link sends e-mail)).
|
6006a |
Precision aperture(s), 8 µm –12 µm thick aperture, no metal coating, 76.2 mm SOI wafer |
$10,000 |
|
6006b |
Precision aperture(s), 8 µm – 12 µm thick aperture, metal coating on aperture/front side, 76.2 mm SOI wafer |
$12,000 |
|
6006c |
Micro-machined silicon aperture coated with metal on both sides |
Discontinued |
|
6006d |
Micro-machined silicon aperture coated with metal and vertically-aligned carbon nanotubes on one side |
Discontinued |
| 6006e |
Precision aperture(s), 200 nm – 1000 nm thick aperture, no metal coating, 76.2 mm SOI wafer |
$15,800 |
| 6006f |
Precision aperture(s), 200 nm – 1000 nm thick aperture, metal coating on aperture/front side, 76.2 mm SOI wafer |
$17,700 |
| 6006g |
Aperture(s), 300 µm – 500 µm thick through holes, vertically-aligned carbon nanotubes on one side, 76.2 mm SOI wafer |
$14,500 |
| 6006h |
Precision aperture(s), 8 µm – 12 µm thick aperture, metal coating on aperture/front side, 150 mm SOI wafer |
$12,500 |