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SRI 6006 Precision Micro-machined Apertures

Technical Contact: Nathan Tomlin

Precision micro-machined apertures are fabricated from silicon on insulator (SOI) wafers. Lithographic processing allows great flexibility in the aperture design, enabling precise placement of apertures, through holes, and chip outlines. Optionally, metal can be deposited for low emissivity and multiwall vertically-aligned carbon nanotubes can be grown for high emissivity.

Specifications Certificate (PDF format)

Standard Configurations

The prices listed below are for the individual instrument and do not include costs related to the final measurement calibration performed before delivery or post-delivery installation and training.  The related Calibration Service ID for the SRI is 10022S.  To obtain a nist-quote for the instrument and calibration services, please contact Sales and Customer Service by phone at 301-975-2200 or email at srminfo@nist.gov (link sends e-mail).

 

6006a

Micro-machined silicon aperture, 8-12 µm thick aperture, no metal coating

$8,400

6006b

Micro-machined silicon aperture, 8-12 µm thick aperture, metal coating on aperture/front side 

$9,400

6006c

Micro-machined silicon aperture coated with metal on both sides

Discontinued

6006d

Micro-machined silicon aperture coated with metal and vertically-aligned carbon nanotubes on one side

Discontinued

6006e Micro-machined silicon aperture, 200-1000 nm thick aperture, no metal coating $12,900
6006f Micro-machined silicon aperture, 200-1000 nm thick aperture, metal coating on aperture/front side $13,900
6006g Micro-machined silicon aperture, 300-500 µm thick through holes, vertically-aligned carbon nanotubes on one side  $9,900

 

Created September 28, 2016, Updated May 19, 2020