Technical Contact: nathan.tomlin [at] nist.gov (Nathan Tomlin)
Precision micro-machined apertures are fabricated from silicon on insulator (SOI) wafers. Lithographic processing allows great flexibility in the aperture design, enabling precise placement of apertures, through holes, and chip outlines. Optionally, metal can be deposited for low emissivity and multiwall vertically-aligned carbon nanotubes can be grown for high emissivity.
Specifications Certificate (PDF format)
Standard Configurations
The prices listed below are for the individual instrument and do not include costs related to the final measurement calibration performed before delivery or post-delivery installation and training. The related Calibration Service ID for the SRI is 10022S. To obtain a quote for the instrument and calibration services, please contact Sales and Customer Service by phone at 301-975-2200 or email at srminfo [at] nist.gov ( (link sends e-mail))class="mailto".
6006a |
Micro-machined silicon aperture, 8-12 µm thick aperture, no metal coating |
$8,300 |
6006b |
Micro-machined silicon aperture, 8-12 µm thick aperture, metal coating on aperture/front side |
$9,800 |
6006c |
Micro-machined silicon aperture coated with metal on both sides |
Discontinued |
6006d |
Micro-machined silicon aperture coated with metal and vertically-aligned carbon nanotubes on one side |
Discontinued |
6006e | Micro-machined silicon aperture, 200-1000 nm thick aperture, no metal coating | $12,900 |
6006f | Micro-machined silicon aperture, 200-1000 nm thick aperture, metal coating on aperture/front side | $14,400 |
6006g | Micro-machined silicon aperture, 300-500 µm thick through holes, vertically-aligned carbon nanotubes on one side | $11,900 |