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Silicon Nanowire Electromechanical Switches for Logic Device Application



Qiliang Li, Sang-Mo Koo, Monica D. Edelstein, John S. Suehle, Curt A. Richter


Electromechanical switches consisting of chemical-vapor-deposition grown silicon nanowires suspended over metal electrodes have been fabricated successfully by using single nanowires manipulation and compatible photolithographic processes. The switches are sharply turned on when the suspended part of nanowire is bent to touch the bottom metal electrode by applying an electric field across the devices. These reversible switching characteristics are observed from both two and three terminal switches. The large ON/OFF ratio of the devices combined with their simple structures which streamline the fabrication process makes them attractive for use in nanoelectromechanical system applications such as logic switches and memory devices.


electromechanical switch, nanowire, threshold voltage


Li, Q. , Koo, S. , Edelstein, M. , Suehle, J. and Richter, C. (2007), Silicon Nanowire Electromechanical Switches for Logic Device Application, Nanotechnology, [online], (Accessed June 21, 2024)


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Created July 5, 2007, Updated October 12, 2021